| Parameter | 4-Inch Specifications | 6-Inch Specifications | 8-Inch Specifications |
| waves（λ） | 365nm | 365nm | 365/405nm |
| Effective Area | Ф110mm | 160x160mm² | 205x205mm² |
| Irradiance | 5-55mw/cm2&365nm | 5-40mw/cm2&365nm | 5-50mw/cm2&365nm |
| Non-uniformity | ≤3% | ≤3% | ≤4% |
| Working Distance | 100mm（Compatible with 50-150mm） | 320mm(Compatible with 200-400mm) | 250mm(Compatible with 200-400mm) |
| Size | 718x290x452mm（LxWxH） | 467x280x460mm（LxWxH） | 530x388x562mm（LxWxH） |
| Application Fields | Suitable for Exposure of IGBTs, MOSFETs, Diodes, Rectifier Bridges and Other Power Devices,et al. | Suitable for Exposure of IGBTs, MOSFETs, Diodes, Rectifier Bridges and Other Power Devices,et al. | Glass-Metal Grid Lines, GPP Power Devices,et al. |
